Al mirrors in vacuum ultraviolet region

Fengli Wang; Shuangying Li; Hongjun Zhou; Tonglin Huo; Zhanshan Wang

doi:10.1117/12.2537954

19 November 2019 Al mirrors in vacuum ultraviolet region

Fengli Wang, Shuangying Li, Hongjun Zhou, Tonglin Huo, Zhanshan Wang

Proceedings Volume 11185, Optical Design and Testing IX; 111850L (2019) https://doi.org/10.1117/12.2537954
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

Aluminum mirrors with high reflectivity have a wide range of applications in the vacuum ultraviolet, such as for space observation, synchrotron radiation. Due to the oxidation of Al has great effect on the reflectivity below the wavelength of 160 nm, Al-protected mirrors have experienced significant development over the past years, particularly like Al overcoated with LiF, MgF₂. This paper focuses on Al mirror over-coated with LiF, MgF₂ and LiF+MgF₂ in the wavelength range of 105-130 nm. The mirrors are prepared by three steps thermal boat evaporation method. The reflectivity of mirrors in the wavelength range of 105~130 nm is measuring at the National Synchrotron Radiation Laboratory (NSRL) of China， and the structural properties have been analyzed using grazing incidence X-ray reflectometer. Compared the reflectivity of samples placed in the relative humidity of 40%, the reflectivity of Al + LiF mirrors has dropped significantly within 2 months, while the reflectivity of Al+MgF₂ mirrors almost has no change within 30 months. The reflectivity of Al +LiF+MgF₂ mirrors stored in the relative humidity of 40% performs well within 4 months and we will further study the time stability.

Citation Download Citation

Fengli Wang, Shuangying Li, Hongjun Zhou, Tonglin Huo, and Zhanshan Wang "Al mirrors in vacuum ultraviolet region", Proc. SPIE 11185, Optical Design and Testing IX, 111850L (19 November 2019); https://doi.org/10.1117/12.2537954

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