Microscopic fringe projection profilometry comparison based on stereoscopic microscope and telecentric lenses

Yan Hu; Yichao Liang; Tianyang Tao; Wei Yin; Jiaming Qian; Shijie Feng; Chao Zuo; Qian Chen

doi:10.1117/12.2537483

18 November 2019 Microscopic fringe projection profilometry comparison based on stereoscopic microscope and telecentric lenses

Yan Hu, Yichao Liang, Tianyang Tao, Wei Yin, Jiaming Qian, Shijie Feng, Chao Zuo, Qian Chen

Author Affiliations +

Proceedings Volume 11189, Optical Metrology and Inspection for Industrial Applications VI; 1118909 (2019) https://doi.org/10.1117/12.2537483
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

As the digital projector develops, fringe projection profilometry has been widely used in the fast 3D measurement. However, the field of view of traditional 3D measurement systems is commonly in decimeters, which limits the 3D reconstruction accuracy to tens of microns. If we want to improve the accuracy further, we have to minimize the field of view and meanwhile increase the fringe density in space. For this purpose, we developed two kinds of systems based on a stereo-microscope and telecentric lenses, respectively. We also studied the corresponding calibration frameworks and developed fast 3D measurement methods with both Fourier transform and phase- shifting algorithms for real-time 3D reconstruction of micro-scale objects.

Citation Download Citation

Yan Hu, Yichao Liang, Tianyang Tao, Wei Yin, Jiaming Qian, Shijie Feng, Chao Zuo, and Qian Chen "Microscopic fringe projection profilometry comparison based on stereoscopic microscope and telecentric lenses", Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 1118909 (18 November 2019); https://doi.org/10.1117/12.2537483

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available