The Influence Of Small Amounts Of Impurities In Sputtered Laser Mirrors On Their Performance

Volker Scheuer; Carsten Schuchert; Theo Tschudi

doi:10.1117/12.961355

8 January 1990 The Influence Of Small Amounts Of Impurities In Sputtered Laser Mirrors On Their Performance

Volker Scheuer, Carsten Schuchert, Theo Tschudi

Proceedings Volume 1125, Thin Films in Optics; (1990) https://doi.org/10.1117/12.961355
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

The absorption in Ion Beam Sputtered laser mirrors was examined. It is known that impurities influences the absorption of optical films. Therefore the impurity content of the sputtered films has been investigated using total reflection X-ray fluorescence analysis (TRFA). Impurity analysis revealed stainless steel components (iron, chromium, nickel) to be an important part of the impurities, but also material from the preceding sputter run was detected. The absorption measurement showed that besides the stainless steel components the cosputtered material leads to an enlarged absorption. These absorptions are causing mirrors deformations in a high power argon laser.

Citation Download Citation

Volker Scheuer, Carsten Schuchert, and Theo Tschudi "The Influence Of Small Amounts Of Impurities In Sputtered Laser Mirrors On Their Performance", Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); https://doi.org/10.1117/12.961355

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