Noise analysis of MEMS gyroscope under force rebalance closed loop detection

Feng Bu; Bo Fan; Shuwen Guo; Dacheng Xu; Heming Zhao

doi:10.1117/12.2559706

31 December 2019 Noise analysis of MEMS gyroscope under force rebalance closed loop detection

Feng Bu, Bo Fan, Shuwen Guo, Dacheng Xu, Heming Zhao

Proceedings Volume 11384, Eleventh International Conference on Signal Processing Systems; 1138408 (2019) https://doi.org/10.1117/12.2559706
Event: Eleventh International Conference on Signal Processing Systems, 2019, Chengdu, China

Abstract

Angle Random Walk (ARW) is an important performance index of the MEMS gyroscope, which is determined by the noise in the control system. In this paper, the thermal noise of gyroscope, the noise of pickoff circuit and feedback circuit are considered, and the noise model of control system is constructed under force-to-rebalance (FTR) closed-loop detection. The influence of system parameters on the power spectral density (PSD) of noise equivalent rate (NER) is analyzed, and the noise is reduced by adjusting system parameters reasonably. Simulink numerical simulation proves the correctness of the noise model.

Citation Download Citation

Feng Bu, Bo Fan, Shuwen Guo, Dacheng Xu, and Heming Zhao "Noise analysis of MEMS gyroscope under force rebalance closed loop detection", Proc. SPIE 11384, Eleventh International Conference on Signal Processing Systems, 1138408 (31 December 2019); https://doi.org/10.1117/12.2559706

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