1Ctr. de Investigación Científica y de Educación Superior de Ensenada (Mexico) 2Univ. Nacional Autónoma de México (Mexico) 3Univ. de Technologie Troyes (France)
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An experimental and theoretical study of the scattering and diffraction properties of nanopatterned dielectric structures is presented. The samples consist of periodic arrays of silicon disks over a flat layer of silicon dioxide on a silicon substrate. The samples produce far-field scattering patterns that display a series of well-defined circular fringes that modulate the intensity of the diffraction orders. Simple models of the physical mechanisms that give rise to the observed phenomena are proposed. Measurements of the angular scattering distribution produced by the samples are presented and compared them with the results of numerical calculations.
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Anna Shlyagina, Alma K. Gonzalez-Alcalde, Rafael Salas-Montiel, Eugenio R. Mendez, "Interference and scattering effects in the diffraction patterns of nanostructured layered samples," Proc. SPIE 11485, Reflection, Scattering, and Diffraction from Surfaces VII, 1148507 (20 August 2020); https://doi.org/10.1117/12.2570623