Octopus: A simple and effective tool for polishing slurry monitoring

Michael F. Benisch; Christian Vogt; Rolf Rascher; Oliver Fähnle

doi:10.1117/12.2567952

20 August 2020 Octopus: A simple and effective tool for polishing slurry monitoring

Michael F. Benisch, Christian Vogt, Rolf Rascher, Oliver Fähnle

Proceedings Volume 11487, Optical Manufacturing and Testing XIII; 1148707 (2020) https://doi.org/10.1117/12.2567952
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

The present paper shows a way for a cost-effective, integrated measurement of the density p of polishing suspensions. It is based on the principle of measuring the turbidity of a solution on the basis of the light transmitted through it, and of calculating back to the density on the basis of the turbidity. The tool is suitable for monitoring polishing agents and for detecting when the density of the polishing slurry leaves the permissible parameter space and can perspectively enable the automated monitoring and adjustment of polishing suspensions. The tool is named after an Octopus. These animals have amazing abilities, for example they can copy the behaviour of other sea animals or act with a plan. Their tentacles each have their own brain and can perform biochemical analyses.

Citation Download Citation

Michael F. Benisch, Christian Vogt, Rolf Rascher, and Oliver Fähnle "Octopus: A simple and effective tool for polishing slurry monitoring", Proc. SPIE 11487, Optical Manufacturing and Testing XIII, 1148707 (20 August 2020); https://doi.org/10.1117/12.2567952

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