Improved non-CAR type hemicellulose resists for EUV lithography

Kazuyo Morita; Yasuaki Tanaka; Kimiko Yamamoto; Hiroki Tanaka; Masahiko Harumoto; Yuji Tanaka; Chisayo Mori; Tomohiro Motono; Harold Stokes; Andreia Figueiredo dos Santos; Masaya Asai

doi:10.1117/12.2583761

22 February 2021 Improved non-CAR type hemicellulose resists for EUV lithography

Kazuyo Morita, Yasuaki Tanaka, Kimiko Yamamoto, Hiroki Tanaka, Masahiko Harumoto, Yuji Tanaka, Chisayo Mori, Tomohiro Motono, Harold Stokes, Andreia Figueiredo dos Santos, Masaya Asai

Author Affiliations +

Proceedings Volume 11612, Advances in Patterning Materials and Processes XXXVIII; 1161207 (2021) https://doi.org/10.1117/12.2583761
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

As the next generation of Extreame Ultraviolet (EUV) lithography, high-NA EUV is proposed. EUV resist is one of the challenges to achieve it. Non-CAR type hemicellulose resist was proposed last year and improved for high-NA EUV resist. The target is stable and high resolution chain scission resist. It was confirmed that hemicellulose works as a radical source by electron spin resonanse(ESR) analysis and hemicellulose improves EUV sensitivity from 50 to 28 mJ/cm2. The primary advantage of the hemicellulose resist is its excellent wafer transportability. The properties of resist such as low metal contamination, resist film uniformity, and edge cut were confirmed. The optimization of the lithography process improves the resolution of hemicellulose resist and pitch 26 nm L/S pattern was obtained with OPAL^TM-RH02. Furthermore, hole pattern of pitch 40 nm was also obtained.

Conference Presentation

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Kazuyo Morita, Yasuaki Tanaka, Kimiko Yamamoto, Hiroki Tanaka, Masahiko Harumoto, Yuji Tanaka, Chisayo Mori, Tomohiro Motono, Harold Stokes, Andreia Figueiredo dos Santos, and Masaya Asai "Improved non-CAR type hemicellulose resists for EUV lithography", Proc. SPIE 11612, Advances in Patterning Materials and Processes XXXVIII, 1161207 (22 February 2021); https://doi.org/10.1117/12.2583761

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