Author Affiliations +
Meihua Shen,1 John Hoang,1 Hao Chi,1 Danna Qian,1 George Papasouliotis,1 Jonathan Church,1 Pramod Subramonium,1 Eric Hudson,1 Leonid Belau,1 Katherine Haynes,1 Matt Weimer,1 Ragesh Puthenkovilakam,1 Sirish Reddy,1 Sonal Bhadauriya,1 Thorsten Lill1
1Lam Research Corp. (United States)