Research progress of chlorine-free synthetic silica glass

Peng Xiao; Yu-Fen Wang; Zai-Kui Xiang; Lan-Jian Nie; Lei Wang; Chuan-Dong Rao; Bo Fu; Yan-An Jia; Zhu-Feng Shao; Hui Wang; Hong-Jie Wang

doi:10.1117/12.2584943

4 December 2020 Research progress of chlorine-free synthetic silica glass

Peng Xiao, Yu-Fen Wang, Zai-Kui Xiang, Lan-Jian Nie, Lei Wang, Chuan-Dong Rao, Bo Fu, Yan-An Jia, Zhu-Feng Shao, Hui Wang, Hong-Jie Wang

Author Affiliations +

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 116170W (2020) https://doi.org/10.1117/12.2584943
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

Silica glass has many excellent properties such as high spectral transmittance and radiation resistance, and is widely used in semiconductors, lasers, optical instruments and other fields. The high performance synthetic silica glass prepared by SiCl4 has the problem of pollution of tail gas and waste water in the process of production, while chlorine-free organic silicon used in the preparation of synthetic silica glass can effectively solve the problem of environmental pollution. In this review, combined with the recent studies on the synthesis of silica glass using octamethylcyclotetrasiloxane(OMCTS, D4) as raw materials, this review mainly review the purification of octamethylcyclotetrasiloxane and the preparation technology of synthetic silica glass, as well as the characteristics of the internal reaction mechanism, and the related technologies, the prospect of synthetic silica glass technology is forecasted.

Citation Download Citation

Peng Xiao, Yu-Fen Wang, Zai-Kui Xiang, Lan-Jian Nie, Lei Wang, Chuan-Dong Rao, Bo Fu, Yan-An Jia, Zhu-Feng Shao, Hui Wang, and Hong-Jie Wang "Research progress of chlorine-free synthetic silica glass", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 116170W (4 December 2020); https://doi.org/10.1117/12.2584943

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