Preparation technology of ultra thin fused silica glass sheet

Xiurong Du; Xiaoqiang Zhang; Yuancheng Sun; Xuefu Song; Jiajia Wang; Ning Hua

doi:10.1117/12.2585148

4 December 2020 Preparation technology of ultra thin fused silica glass sheet

Xiurong Du, Xiaoqiang Zhang, Yuancheng Sun, Xuefu Song, Jiajia Wang, Ning Hua

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 116171E (2020) https://doi.org/10.1117/12.2585148
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

The fused silica glass is needed in the electronics and micro manufacturing industry. The thickness requirement is 0.02 ~ 0.2mm, which is difficult to be achieved by traditional machining. In this paper, a new thinning technology is proposed. Through the combination of chemical mechanical polishing (CMP and chemical etching, ultra-thin fused silica glass with diameter of 50 mm, thickness of 0.05 mm and Ra＜1 nm can be prepared. It was also found that the fused silica glass could be thinned uniformly and efficiently by high-speed rotation and adding active agent in the chemical etching process.

Citation Download Citation

Xiurong Du, Xiaoqiang Zhang, Yuancheng Sun, Xuefu Song, Jiajia Wang, and Ning Hua "Preparation technology of ultra thin fused silica glass sheet", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 116171E (4 December 2020); https://doi.org/10.1117/12.2585148

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available