Correction of different spatial frequency errors of large and thin optical windows based on ion beam figuring

Gang Wang; Chao Cai; Xu Hua Gao; Jin Yong Huang; Xiang He; Ping Ma; Rui Jie Li; Lei Xie; Ding Yao Yan

doi:10.1117/12.2585302

4 December 2020 Correction of different spatial frequency errors of large and thin optical windows based on ion beam figuring

Gang Wang, Chao Cai, Xu Hua Gao, Jin Yong Huang, Xiang He, Ping Ma, Rui Jie Li, Lei Xie, Ding Yao Yan

Author Affiliations +

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 116172B (2020) https://doi.org/10.1117/12.2585302
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

The large and thin plane optical windows are used in large high power laser devices. Typically conventional methods such as stressed-lap polishing and small-tool pitch polishing are used to manufacture these optics. Nevertheless, the required wavefront accuracy cannot be achieved by the last smal-tool pitch polishing process which can lead to middle spatial frequency errors and high-slope errors because of the edge effect , unstable removal rate and pressure -loaded deformation. Ion Beam Figuring (IBF) technology is an optical fabrication method which can highly correct different spatial frequency errors due to the highly deterministic, highly stable, very small tools and noncontact. In this paper, IBF was employed to correct different spatial frequency errors of a large and thin plane optical windows. Before IBF, transmission wavefront error of the substrate was 0.51λ PV, 32.3nm/cm GRMS, 2.91nm PSD1, 0.27nm PSD2, 0.38nm Rq after being polished by double-sided polishing machine, and was improved to 0.07λ PV, 2.1nm/cm GRMS, 1.76nm PSD1, 0.13nmPSD2, 0.33nmRq after only two IBF(about thirty six hours processing time). All spatial frequency errors reached the required values.

Citation Download Citation

Gang Wang, Chao Cai, Xu Hua Gao, Jin Yong Huang, Xiang He, Ping Ma, Rui Jie Li, Lei Xie, and Ding Yao Yan "Correction of different spatial frequency errors of large and thin optical windows based on ion beam figuring", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 116172B (4 December 2020); https://doi.org/10.1117/12.2585302

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available