A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

Zhenjie Gu; Xiao Deng; Yanni Cai; Xinpan Wang; Feng Yang

doi:10.1117/12.2585428

4 December 2020 A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

Zhenjie Gu, Xiao Deng, Yanni Cai, Xinpan Wang, Feng Yang

Author Affiliations +

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 1161736 (2020) https://doi.org/10.1117/12.2585428
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

The error calibration of the nonlinearity of atomic force microscope (AFM) is the critical step to assure the accuracy during the measurement of microscale structure. In this paper, a new method to calibrate the atomic force microscope is proposed, which is based on the one dimensional self-traceable Chromium nanometre length reference material fabricated by the technique of atomic lithography. The pattern of the Cr grating measured by the metrological AFM present that the pitch is 212.8 nm and the accuracy of the pitch is better than 0.1nm. The number of its pitch is obtained by the centroid method on the data of the grating pattern. The nonlinearity of the commercial AFM is calibrated in the way of measuring the mean pitch of the Cr grating under the several different micron scale. This work offers a flexible solution for calibrating the AFM and meet the calibration need in the activity of nanometre fabrication

Citation Download Citation

Zhenjie Gu, Xiao Deng, Yanni Cai, Xinpan Wang, and Feng Yang "A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 1161736 (4 December 2020); https://doi.org/10.1117/12.2585428

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available