Microscopic Digital Imaging Ellipsometry

Kazuyoshi Itoh; Takao Chichibu; Yoshiki Ichioka

doi:10.1117/12.962900

25 January 1990 Microscopic Digital Imaging Ellipsometry

Kazuyoshi Itoh, Takao Chichibu, Yoshiki Ichioka

Proceedings Volume 1166, Polarization Considerations for Optical Systems II; (1990) https://doi.org/10.1117/12.962900
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

We present our first step toward digital imaging ellipsometry. The microscope objective and an object is located between a polarizer and an analyzer. We rotate the pair of polarizer and analyzer synchronously keeping the angle between them at right angles. At each rotation angle, the microscope image is sampled and stored successively in a frame memory of an image processor. Simple processing on these images provided us a 2-D distribution of retardations and a 2-D map of the directions of principal axes. Polarization-independent brightness variations were successfully removed by preprocessing.

Citation Download Citation

Kazuyoshi Itoh, Takao Chichibu, and Yoshiki Ichioka "Microscopic Digital Imaging Ellipsometry", Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); https://doi.org/10.1117/12.962900

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available