Use of sacrificial zinc oxide template layers for epitaxial lift-off of yttria-stabilised zirconia thin films

D. J. Rogers; T. Maroutian; V. E. Sandana; P. Lecoeur; F. H. Teherani; P. Bove; M. Razeghi

doi:10.1117/12.2591843

13 September 2021 Use of sacrificial zinc oxide template layers for epitaxial lift-off of yttria-stabilised zirconia thin films

D. J. Rogers, T. Maroutian, V. E. Sandana, P. Lecoeur, F. H. Teherani, P. Bove, M. Razeghi

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Proceedings Volume 11687, Oxide-based Materials and Devices XII; 116872C (2021) https://doi.org/10.1117/12.2591843
Event: SPIE OPTO, 2021, Online Only

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Abstract

275 nm-thick Yttria-stabilised zirconia (YSZ) layers were grown on 240 nm-thick epitaxial (0002)-oriented ZnO buffer layers on c-sapphire substrates by pulsed laser deposition (PLD). X-ray diffraction (XRD) studies revealed high quality epitaxial growth with the YSZ having a preferential (111) orientation and a root mean square surface roughness of 1.4 nm over an area of 10 um x 10 um. The YSZ top surface was then temporary bonded to an Apiezon W wax carrier and the sample was immersed in 0.1M HCl so as to preferentially etch/dissolve away the ZnO underlayer and release of the YSZ from the sapphire substrate. XRD revealed only the characteristic (111) peak of YSZ after lift-off and thus confirmed both the dissolution of the ZnO and the preservation of the crystallographic integrity of the YSZ on the wax carrier. Optical and Atomic Force Microscopy revealed some buckling, roughening and cracking of the lifted YSZ, however, which was probably due to tensile epitaxial strain release.

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D. J. Rogers, T. Maroutian, V. E. Sandana, P. Lecoeur, F. H. Teherani, P. Bove, and M. Razeghi "Use of sacrificial zinc oxide template layers for epitaxial lift-off of yttria-stabilised zirconia thin films", Proc. SPIE 11687, Oxide-based Materials and Devices XII, 116872C (13 September 2021); https://doi.org/10.1117/12.2591843

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