Paper
13 February 1990 Simple, Repeatable, Fiber-Optic Intensity Sensor For Temperature Measurement
J. W. Berthold, S. E. Reed, R. G. Sarkis
Author Affiliations +
Abstract
We have demonstrated the performance of a fiber-optic intensity sensor for temperature measurement. The method measures the change in absorption with the temperature of light reflected from a thin silicon film deposited on the end of an optical fiber. Our single-ended sensing approach requires that the incident light intensity be reflected from both film surfaces and that these reflected signals re-enter the fiber. Simplifications in sensor fabrication have been shown to yield sensitivity comparable to that reported by other authors. Calibration data on the sensor is presented up to 400°C. Potential applications of the method are discussed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. W. Berthold, S. E. Reed, and R. G. Sarkis "Simple, Repeatable, Fiber-Optic Intensity Sensor For Temperature Measurement", Proc. SPIE 1169, Fiber Optic and Laser Sensors VII, (13 February 1990); https://doi.org/10.1117/12.963070
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KEYWORDS
Temperature metrology

Fiber optics sensors

Light emitting diodes

Silicon films

Sensors

Silicon

Fabry–Perot interferometers

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