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5 March 2021 Cavity optomechanics for trace gas detection
Joris Baraillon, Pierre R. Labeye, Laurent Duraffourg
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Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 1169710 (2021) https://doi.org/10.1117/12.2577220
Event: SPIE OPTO, 2021, Online Only
Abstract
We present a new concept of spectroscopic sensor based on optomechanical transduction. The optomechanical interaction induces a strong dependence of the mechanical properties of a membrane on the optical losses induced by the absorption of an intra-cavity gas. Optically quantifying the variation of these parameters allows us to measure the gas concentration. The system is analysed theoretically and numerically with FEM simulation to estimate the responsivity. Fiber Bragg Grating based Extrinsic Fiber Fabry-Pérot cavity of various types as well as integrated mid-infrared cavities with highly reflective Bragg multilayers mirrors and silicon or stoichiometric silicon nitride membrane are studied.
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Joris Baraillon, Pierre R. Labeye, and Laurent Duraffourg "Cavity optomechanics for trace gas detection", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 1169710 (5 March 2021); https://doi.org/10.1117/12.2577220
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KEYWORDS
Optomechanical design
Silicon
Modulation
Spectroscopy
Mid-IR
Mirrors
Motion measurement
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