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We report high-performance waveguide-integrated germanium photodetectors. The responsivity above 0.95A/W and dark current of 2.9nA were demonstrated with the bias voltage of -1V and input optical wavelength of 1310nm. The 3-dB bandwidth above 67GHz demonstrated due to radio-frequency (RF) resonance effect. The RF resonance is explained by the transfer function of parasitic circuit based on the equivalent circuit model of photodetector. In addition, clear open eye diagrams at 50Gb/s are also shown.
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