Thin layer imaging approach by X-ray amplitude splitting interferometer based on compound refractive lens

D. Zverev; M. Voevodina; S. Lyatun; I. Snigireva; A. Snigirev

doi:10.1117/12.2589584

18 April 2021 Thin layer imaging approach by X-ray amplitude splitting interferometer based on compound refractive lens

D. Zverev, M. Voevodina, S. Lyatun, I. Snigireva, A. Snigirev

Proceedings Volume 11776, EUV and X-ray Optics, Sources, and Instrumentation; 117760A (2021) https://doi.org/10.1117/12.2589584
Event: SPIE Optics + Optoelectronics, 2021, Online Only

Abstract

A novel interferometric approach where the X-ray amplitude splitting interferometer based on the compound refractive lens was used to visualization of thin layers with a thickness of several nanometers applied to the surface of the membrane. The functional capabilities of the proposed technique were theoretically studied and experimentally demonstrated on the example of the gold strip 8 nm thick deposited on the 1000 nm Si₃N₄ membrane. The corresponding numerical simulations were performed. It was shown that the interference pattern is very sensitive to small thickness deviations of the gold layer, resulting in the ability to accurately determine not only its average thickness but also to reconstruct its cross-section profile with a nanometer resolution.

Citation Download Citation

D. Zverev, M. Voevodina, S. Lyatun, I. Snigireva, and A. Snigirev "Thin layer imaging approach by X-ray amplitude splitting interferometer based on compound refractive lens", Proc. SPIE 11776, EUV and X-ray Optics, Sources, and Instrumentation, 117760A (18 April 2021); https://doi.org/10.1117/12.2589584

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