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20 June 2021 Two-step iterative algorithm immune to tilt shifts for phase extraction
Mingliang Duan, Yi Zong, Caiyun Yu, Jianxin Li
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Proceedings Volume 11782, Optical Measurement Systems for Industrial Inspection XII; 117821K (2021) https://doi.org/10.1117/12.2592283
Event: SPIE Optical Metrology, 2021, Online Only
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Abstract
A two-step iterative algorithm (TSIA) immune to tilt shifts is proposed for phase extraction in phase-shifting interferometry (PSI). The TSIA constructs a model of the least-squares iteration of the phase distribution and the tilt shifts based on parametric decoupling. Finally, the phase distribution is extracted via the least-squares method. The experimental results show that the PTI has high accuracy and fast iterative convergence speed for the conditions of the large amplitude of tilt shifts, closed fringes, nonuniform background and modulation.
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Mingliang Duan, Yi Zong, Caiyun Yu, and Jianxin Li "Two-step iterative algorithm immune to tilt shifts for phase extraction", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117821K (20 June 2021); https://doi.org/10.1117/12.2592283
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KEYWORDS
Interferometry
Phase interferometry
Interferometers
Modulation
Phase shifts
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