Effect of PACVD deposition of nitride and Si-containing amorphous hydrogenated carbon films on the tribological characteristics of SiAlON ceramics

Marina A. Volosova; Sergey V. Fedorov; Maxim A. Lyakhovetskiy; Enver S. Mustafaev; Yury A. Melnik

doi:10.1117/12.2594085

1 August 2021 Effect of PACVD deposition of nitride and Si-containing amorphous hydrogenated carbon films on the tribological characteristics of SiAlON ceramics

Marina A. Volosova, Sergey V. Fedorov, Maxim A. Lyakhovetskiy, Enver S. Mustafaev, Yury A. Melnik

Author Affiliations +

Proceedings Volume 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII; 118020T (2021) https://doi.org/10.1117/12.2594085
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

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Abstract

The research aims to investigate the effect of depositing nitride and Si-containing amorphous hydrogenated carbon films on the characteristics of SiAlON-based ceramics experimentally. The effect of TiN/(Ti,Al)N, (Cr,Al,Si)N and (Cr,Al,Si)N/a-C:H:Si coatings on the microrelief and surface defects of ceramics was studied. The nanohardness, plasticity, and coefficient of friction of the ceramic material at room temperature and under heating conditions after applying the mentioned coatings were quantified. Laboratory durability tests of ceramic mills with different coatings during machining a heat-resistant nickel alloy were carried out. A qualitative assessment of the nickel adherence intensity on the work surfaces of ceramic tools during cutting was performed.

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Marina A. Volosova, Sergey V. Fedorov, Maxim A. Lyakhovetskiy, Enver S. Mustafaev, and Yury A. Melnik "Effect of PACVD deposition of nitride and Si-containing amorphous hydrogenated carbon films on the tribological characteristics of SiAlON ceramics", Proc. SPIE 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII, 118020T (1 August 2021); https://doi.org/10.1117/12.2594085

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