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In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.
D. Moszko,O. Faehnle,C. Vogt, andD. Kim
"In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization", Proc. SPIE 11853, Eighth European Seminar on Precision Optics Manufacturing, 118530E (7 June 2021); https://doi.org/10.1117/12.2596034
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D. Moszko, O. Faehnle, C. Vogt, D. Kim, "In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization," Proc. SPIE 11853, Eighth European Seminar on Precision Optics Manufacturing, 118530E (7 June 2021); https://doi.org/10.1117/12.2596034