X-ray photoelectron spectroscopy studies on polymer surfaces after KrF laser ablation

Fumio Kokai; Hideaki Saito; Tomoo Fujioka

doi:10.1117/12.963982

23 February 1990 X-ray photoelectron spectroscopy studies on polymer surfaces after KrF laser ablation

Fumio Kokai, Hideaki Saito, Tomoo Fujioka

Proceedings Volume 1190, Laser/Optical Processing of Electronic Materials; (1990) https://doi.org/10.1117/12.963982
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

The chemical structures of polyimide(PI) and polyethylene terephthalate) (PET) surfaces after ablation with a single laser pulse from a KrF excimer laser are studied by x-ray photoelectron spectroscopy(XPS). For both polymers, carbon-rich surfaces with a modified bonding environment are found to be produced. The formation mechanisms of these surfaces are discussed in terms of the etching processes based on the preferential bond breaking between the aromatic rings and imide groups in PI and between the aromatic ring and carbonyl groups in PET, followed by rearrangement and recombination reactions. Furthermore, as a result of angular-dependent XPS studies/ the changes in atomic concentration and bonding environment along a 4~º100Å depth of the surfaces remaining after ablation are observed. The possibility of surface oxidation after ablation is discussed.

Citation Download Citation

Fumio Kokai, Hideaki Saito, and Tomoo Fujioka "X-ray photoelectron spectroscopy studies on polymer surfaces after KrF laser ablation", Proc. SPIE 1190, Laser/Optical Processing of Electronic Materials, (23 February 1990); https://doi.org/10.1117/12.963982

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available