InGaAs short wavelength infrared detector based on carrier collection effect

Honghai Deng; Qinghua Yang; Zhiliang Wang; Xinglong Guo; Haibao Shao; Xue Li; Haimei Gong

doi:10.1117/12.2607037

24 November 2021 InGaAs short wavelength infrared detector based on carrier collection effect

Honghai Deng, Qinghua Yang, Zhiliang Wang, Xinglong Guo, Haibao Shao, Xue Li, Haimei Gong

Proceedings Volume 12061, AOPC 2021: Infrared Device and Infrared Technology; 120611R (2021) https://doi.org/10.1117/12.2607037
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

Based on collection effect of photogenerated carrier, the front-illuminated planar type InGaAs short-wave infrared (SWIR) detectors were fabricated by using N-InP/i-In_0.53Ga_0.47As/N-InP double-hetero structure materials. The series of detectors with the same dimension of 200μm×200μm contain several lateral collection regions and the width of each collection region is 15μm. The photoelectric characteristics of the photoresponse, I-V, spectral response and detectability of detectors with the lateral collection structure and normal structure were further analyzed. The build-in electrical field could effectively collect the electron/hole pairs generated in the lateral collection regions, so the photoresponse of lateral collection detector at 296 K is quite uniform by the laser beam induced current (LBIC) technology. Furthermore, the average peak detectivity and the density of dark current of the detectors with lateral collection structure reached 2.90× 10¹² cm·Hz1/2/W and 3.94 nA/cm² at -0.1 V respectively. It turns out that the lateral collection structure could effectively improve the dark current properties compared with the normal structure.

Citation Download Citation

Honghai Deng, Qinghua Yang, Zhiliang Wang, Xinglong Guo, Haibao Shao, Xue Li, and Haimei Gong "InGaAs short wavelength infrared detector based on carrier collection effect", Proc. SPIE 12061, AOPC 2021: Infrared Device and Infrared Technology, 120611R (24 November 2021); https://doi.org/10.1117/12.2607037

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