Multichannel-optical prism

Lev Ryzhikov

doi:10.1117/12.2630838

3 October 2022 Multichannel-optical prism

Lev Ryzhikov

Proceedings Volume 12217, Current Developments in Lens Design and Optical Engineering XXIII; 122170X (2022) https://doi.org/10.1117/12.2630838
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Conference Poster

Abstract

Currently, many optical tests required simultaneous measurement values of various technological or metrological parameters. This demand primarily applies to pieces or parts of products that are under variable load during operation. These technological measurements primarily relate to production and metrological works. Examples include optical testing of deformations of parts (e.g., plates) under variable load, shifts of various components of high-precision equipment, and, of course, various metrological measurements of high-precision equipment, such as lithographic machines and different types of measuring and control devices. Simultaneous measurement of the same parameter in different parts of the product allows for to determination of the error (e.g., deformation or alignment error) in object position during operation. Observation and analysis of the position of specific points on the object allow one to judge deviations both in position and deformation of the measured surface. The proposed multichannel optical prism can simultaneously observe several points located on the different parts of the object, as well as monitor their movements and deformations in working conditions. This information allows you to determine the operating conditions of various structural elements during real operation. The multichannel prism should be built into the optical circuit of the measuring (metrological) device. The use of prisms of this type allows simultaneous observation of the movement (deformation) of various parts of the observed objects. Some examples of such kinds of optical devices with a build-in multichannel prism will be discussed below.

Citation Download Citation

Lev Ryzhikov "Multichannel-optical prism", Proc. SPIE 12217, Current Developments in Lens Design and Optical Engineering XXIII, 122170X (3 October 2022); https://doi.org/10.1117/12.2630838

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