Paper
1 June 1990 Three-dimensional excimer laser cavity model
John H. Erkkila, William R. Espander
Author Affiliations +
Proceedings Volume 1224, Optical Resonators; (1990) https://doi.org/10.1117/12.18464
Event: OE/LASE '90, 1990, Los Angeles, CA, United States
Abstract
A three-dimensional model of an excimer laser cavity has been used to assess the performance of a flowing XeF laser system. The laser operates with a two-sided electron beam pump, a converging flow channel, and a confocal unstable resonator with a decentered optical axis. The effects on the performance of the laser from changes in the laser gas temperature, electron beam pumping conditions, and resonator parameters are evaluated.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John H. Erkkila and William R. Espander "Three-dimensional excimer laser cavity model", Proc. SPIE 1224, Optical Resonators, (1 June 1990); https://doi.org/10.1117/12.18464
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KEYWORDS
Laser resonators

Gas lasers

Resonators

Electron beams

3D modeling

Optical resonators

Pulsed laser operation

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