A high-precision calibration method of PSD in long-distance laser auto-collimation system

Wenzheng Liu; Cong Zhang; Fajie Duan; Xiao Fu; Ruijia Bao; Xiuming Li; Ming Yan

doi:10.1117/12.2611945

8 July 2022 A high-precision calibration method of PSD in long-distance laser auto-collimation system

Wenzheng Liu, Cong Zhang, Fajie Duan, Xiao Fu, Ruijia Bao, Xiuming Li, Ming Yan

Proceedings Volume 12282, 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 122820T (2022) https://doi.org/10.1117/12.2611945
Event: 2021 International Conference on Optical Instruments and Technology, 2022, Online Only

Abstract

Laser auto-collimation technology is an important method of precision micro-angle measurement. It has the advantages of high measurement accuracy and simple optical structure. However, the position-sensitive detector (PSD) has nonlinearity, and the uniformity of laser spot is affected by the working distance of the auto-collimation system, which seriously affects the accuracy of angle measurement based on laser auto-collimation technology. To improve the accuracy of laser auto-collimation technology in long-distance angle measurement, PSD is calibrated by linear interpolation to solve the error caused by its nonlinearity. In addition, due to the non-uniformity of the light spot, the PSD zero point is not collinear at different distances, and the measurement error can be corrected by a laser interferometer. Experimental results showed that the interpolation calibration method effectively improved the angle measurement accuracy of PSD. After the zero deviation was corrected, when the PSD moved within 5m, the maximum standard deviation (SD) of the pitch error was 0.12 ", and the SD of the yaw error was 0.09 ". The method proposed in this paper can achieve high precision angle measurement based on PSD at long working distances.

Citation Download Citation

Wenzheng Liu, Cong Zhang, Fajie Duan, Xiao Fu, Ruijia Bao, Xiuming Li, and Ming Yan "A high-precision calibration method of PSD in long-distance laser auto-collimation system", Proc. SPIE 12282, 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 122820T (8 July 2022); https://doi.org/10.1117/12.2611945

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KEYWORDS

Calibration

Interferometers

Laser systems engineering

Distance measurement

Laser applications

Lithium

Receivers

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