Fast and nanoscale-accuracy surface recovery of white-light scanning interferometry based on GPU-accelerated FFT-LMA-PSI algorithm

Yiting Duan; Xiaodong Zhang; Zexiao Li

doi:10.1117/12.2616384

8 July 2022 Fast and nanoscale-accuracy surface recovery of white-light scanning interferometry based on GPU-accelerated FFT-LMA-PSI algorithm

Yiting Duan, Xiaodong Zhang, Zexiao Li

Author Affiliations +

Proceedings Volume 12282, 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 1228215 (2022) https://doi.org/10.1117/12.2616384
Event: 2021 International Conference on Optical Instruments and Technology, 2022, Online Only

Abstract

White-light scanning interferometry (WLSI) has been widely in the field of Nano-Micro topography measurement. In this study , to improve accuracy and robust of surface recovery, the Fast Fourier Transform-Levenberg Marquardt Algorithm-Phase Shift Interference (FFT-LMA-PSI) algorithm is first proposed to position zero optical path difference (OPD), and the FFT-LMA-PSI algorithm is a cascaded algorithm that involves FFT and multiple iterative optimization steps. In order to improve the computational efficiency, the GPU-accelerated FFT-LMA-PSI is developed and designed via compute unified device architecture (CUDA) C language. The speedup ratio of the proposed method are 28.6756×, 36.6950×, 41.9732×, 33.1928× for CCD pixel sizes of 128 × 128, 256 × 256, 512 × 512, 1024 × 1024. The standard deviation (σ) error are 7.34 nm and 9.79 nm and the peak-valley (PV) error are 87.04 nm and 90.36 nm for the Step and Sphere, respectively. The experiment shows that the proposed method has good performance in calculation accuracy and efficiency.

Citation Download Citation

Yiting Duan, Xiaodong Zhang, and Zexiao Li "Fast and nanoscale-accuracy surface recovery of white-light scanning interferometry based on GPU-accelerated FFT-LMA-PSI algorithm", Proc. SPIE 12282, 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 1228215 (8 July 2022); https://doi.org/10.1117/12.2616384

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KEYWORDS

Charge-coupled devices

Interferometry

Algorithm development

Coherence (optics)

Optical spheres

Algorithms

Ferroelectric materials

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