Non-contact surface roughness measurement with a light-field camera

Yoshitaka Igarashi; Toshiyasu Mitsunari; Kazunori Yamazaki

doi:10.1117/12.2642062

19 December 2022 Non-contact surface roughness measurement with a light-field camera

Yoshitaka Igarashi, Toshiyasu Mitsunari, Kazunori Yamazaki

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123190T (2022) https://doi.org/10.1117/12.2642062
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

A new non-contact surface roughness measurement technology has been developed. This is a technique that helps ensure the traceability of each component in the manufacturing process. Specifically, the surface roughness parameters Sq and Sdq were measured and evaluated using scattered light simulation and a light field camera. The roughness parameter Sq was determined using the generalized Harvey-Shack scattering theory and showed good agreement with existing machines. Furthermore, the roughness parameter Sdq was estimated from the argument “a” extracted from the K-correlation model.

Conference Presentation

Citation Download Citation

Yoshitaka Igarashi, Toshiyasu Mitsunari, and Kazunori Yamazaki "Non-contact surface roughness measurement with a light-field camera", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123190T (19 December 2022); https://doi.org/10.1117/12.2642062

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