Surface and bulk damage resistance of calcium fluoride optics assessed by x-ray induced color centers

Jue Wang; François Piché; Eileen M. Fanning

doi:10.1117/12.2650614

17 March 2023 Surface and bulk damage resistance of calcium fluoride optics assessed by x-ray induced color centers

Jue Wang, François Piché, Eileen M. Fanning

Proceedings Volume 12402, Components and Packaging for Laser Systems IX; 1240208 (2023) https://doi.org/10.1117/12.2650614
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

A rhodium-emitted X-ray with a photon energy at 20 KeV was employed to irradiate CaF₂ with different surface finishing. Color centers associated with the irradiation damage were determined by spectral measurements. The depth distribution of the color centers was calculated and confirmed in a wedge spot generated by magnetorheological finishing. The results suggest that the color center formation is directly associated with the damage resistance of the optics. Laser durable grade CaF₂ demonstrates higher damage resistance to the X-ray irradiation when compared to excimer ArF laser grade CaF₂. Subsurface-damage-free CaF₂ surfaces further enhance the damage resistance.

Conference Presentation

Citation Download Citation

Jue Wang, François Piché, and Eileen M. Fanning "Surface and bulk damage resistance of calcium fluoride optics assessed by x-ray induced color centers", Proc. SPIE 12402, Components and Packaging for Laser Systems IX, 1240208 (17 March 2023); https://doi.org/10.1117/12.2650614

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