Physical and electrical characterization of a silicon suboxide seed layer

Seref Kalem

doi:10.1117/12.2662575

16 March 2023 Physical and electrical characterization of a silicon suboxide seed layer

Seref Kalem

Proceedings Volume 12422, Oxide-based Materials and Devices XIV; 124220J (2023) https://doi.org/10.1117/12.2662575
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

The silicon suboxide SiOx (x<2.0) offers promising application possibilities ranging from electrodes in lithium-ion batteries used widely in electrical vehicles and portable devices to sensing applications. Therefore, a low cost, environmental friendly and high performance oxide materials are required for an appropriate operation of any electronic gadget. In this work, we report on the physical and electrical properties of a suboxide formed as a seed layer during the formation of a dielectric layer, namely the ammonium silicon hexafluoride. The measurement results reveal interesting properties, which are required to be understood clearly before any application. The results have been analyzed using state-of-the-art techniques and compared with the developments of SiOx obtained by related techniques. In this presentation, a comprehensive review of the physical and electrical properties is given in order to clarify the origin of the observed features. At the end of the paper, a lookout is provided for the possible applications of this special SiOx dielectric seed layer.

Conference Presentation

Citation Download Citation

Seref Kalem "Physical and electrical characterization of a silicon suboxide seed layer", Proc. SPIE 12422, Oxide-based Materials and Devices XIV, 124220J (16 March 2023); https://doi.org/10.1117/12.2662575

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available