Fabrication and characterization of the surface acoustic wave (SAW) based hydrogen sensor

Suganya A.; Sujatha L.; Girija K. G.

doi:10.1117/12.2651065

16 March 2023 Fabrication and characterization of the surface acoustic wave (SAW) based hydrogen sensor

Suganya A., Sujatha L., Girija K. G.

Proceedings Volume 12422, Oxide-based Materials and Devices XIV; 124220Y (2023) https://doi.org/10.1117/12.2651065
Event: SPIE OPTO, 2023, San Francisco, California, United States

Conference Poster

Abstract

Surface Acoustic Wave (SAW) technique is one of the most promising MEMS-based detection systems for gas sensing. It depends on the modulation of SAW to detect the target gases. The benefits of an acoustic wave hydrogen sensor include high sensitivity, simplicity, stability, quick response time, etc. The SAW sensor converts an input electrical signal into an acoustic wave which can be easily influenced under mass loading. The change in amplitude, phase, frequency or time-delay between the input and output electrical signals can be used to measure the presence of hydrogen. In the present work, the SAW sensor was designed and fabricated for a resonant frequency of 100 MHz on a Lithium Niobate substrate with palladium (Pd) thin film as the sensing layer. The sensor exhibited linear shift in resonant frequency as a function of hydrogen concentration.

Citation Download Citation

Suganya A., Sujatha L., and Girija K. G. "Fabrication and characterization of the surface acoustic wave (SAW) based hydrogen sensor", Proc. SPIE 12422, Oxide-based Materials and Devices XIV, 124220Y (16 March 2023); https://doi.org/10.1117/12.2651065

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