Improving FEM wafer review efficiency by introducing different pattern grouping modes

Yuan Gan; Changlian Yan; Rongjia Zhang; Ming Ding; Chunying Han; Junhai Jiang; Zongchang Yu

doi:10.1117/12.2656632

28 April 2023 Improving FEM wafer review efficiency by introducing different pattern grouping modes

Yuan Gan, Changlian Yan, Rongjia Zhang, Ming Ding, Chunying Han, Junhai Jiang, Zongchang Yu

Proceedings Volume 12495, DTCO and Computational Patterning II; 124951L (2023) https://doi.org/10.1117/12.2656632
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

As the semiconductor process technology steps into a more advanced node, design and process induced systematic defects become increasingly significant yield limiters. Focus Exposure Matrix (FEM) method is crucial for early detection of these defects. However, analysis of a typical FEM wafer which contains half million of defects requires extensive time and efforts. In order to improve FEM wafers review efficiency, we introduce a smart review point selection strategy based on different layout pattern grouping modes. This review point selection strategy enable engineers to sample the more effective defects for SEM review.

Citation Download Citation

Yuan Gan, Changlian Yan, Rongjia Zhang, Ming Ding, Chunying Han, Junhai Jiang, and Zongchang Yu "Improving FEM wafer review efficiency by introducing different pattern grouping modes", Proc. SPIE 12495, DTCO and Computational Patterning II, 124951L (28 April 2023); https://doi.org/10.1117/12.2656632

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available