Fabrication and performance of a novel CMOS infrared emitter

Jun Yu; Zhongzhou Li; Linfeng Wang; Guanyu Yao; Hao Wu; Zhengxing Huang; Huichao Zhu; Zhenan Tang; Jianwei Zhang

doi:10.1117/12.2656804

27 December 2022 Fabrication and performance of a novel CMOS infrared emitter

Jun Yu, Zhongzhou Li, Linfeng Wang, Guanyu Yao, Hao Wu, Zhengxing Huang, Huichao Zhu, Zhenan Tang, Jianwei Zhang

Proceedings Volume 12504, International Symposium on Silicon-based Optoelectronics (ISSBO 2022); 1250405 (2022) https://doi.org/10.1117/12.2656804
Event: International Symposium on Silicon-based Optoelectronics (ISSBO 2022), 2022, Hangzou, China

Abstract

Si-based thermal infrared emitter is one of the key components of the micro NDIR gas sensor. In this paper, a low power, low-cost, and radiation enhanced thermal infrared emitter was developed and fabricated based on a commercial standard CMOS technology. A CuO-MnO2 film with porous structures was deposited on the center of the freestanding membrane of the device by electrohydrodynamic inkjet printing to enhance the infrared emission. The CMOS infrared emitter takes only about 150 mW to reach 500 ℃. The modulation depth is larger than 90% at 10 Hz and about 50% at 50 Hz. Both the emission spectrums and the infrared radiation power results confirmed that the printed radiation enhance layer significantly improved the radiation intensity of the device in a mid-infrared wavelength of 2.5-8 μm. The stability of the devices was tested by studying the resistance drifts of the emitters after operation for a period of time. The emitter shows excellent stability at 450 ℃ and below. The resistance drift of the emitter operating at 500 ℃ was reduced to about half of the unannealed devices by electrothermal annealing at 650 ℃ for 10 min. The CMOS infrared emitter can be easily integrated with CMOS interface circuits in the future to achieve highly integrated smart sensor.

Citation Download Citation

Jun Yu, Zhongzhou Li, Linfeng Wang, Guanyu Yao, Hao Wu, Zhengxing Huang, Huichao Zhu, Zhenan Tang, and Jianwei Zhang "Fabrication and performance of a novel CMOS infrared emitter", Proc. SPIE 12504, International Symposium on Silicon-based Optoelectronics (ISSBO 2022), 1250405 (27 December 2022); https://doi.org/10.1117/12.2656804

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KEYWORDS

Infrared radiation

Thermography

Resistance

Silicon

CMOS technology

Printing

Annealing

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