A freeform-curved sensor is presented here to demonstrate its highlights in off-axis optical system design. First, we take the extremely demanding TMA telescope as an example, the introduction of the freeform sensor makes the imaging performance reach the diffraction limit, and the PV sag departure of the mirror surface is reduced by 71% compared with the traditional design using flat sensor. Next, we performed finite element analysis on the silicon die with freeform shape to ensure that the stress distribution of the curved sensor is within a safe range when bending. Finally, the prototype of freeform-curved sensor will be manufactured, and its surface shape will be tested in the laboratory.
|