Ultrafast dynamics of femtosecond laser irradiation of silicon with different fluence

Xu Wu; Jingya Sun

doi:10.1117/12.2690764

17 August 2023 Ultrafast dynamics of femtosecond laser irradiation of silicon with different fluence

Xu Wu, Jingya Sun

Proceedings Volume 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023); 127572J (2023) https://doi.org/10.1117/12.2690764
Event: 3rd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2023), 2023, Kunming, China

Abstract

Due to the characteristics of ultrashort pulse duration and ultrahigh peak power of femtosecond laser, it is widely used in manufacturing industry. To monitor ultrafast dynamics during femtosecond laser-material interactions, ultrafast pumpprobe spectroscopy with high spatiotemporal resolution has been used. However, single-crystalline silicon ablation combined with ultrafast electron dynamics and high spatial resolution is still understudied. In this study, we systematically investigated the process of femtosecond laser irradiation of single-crystalline silicon, revealing the mechanism of femtosecond laser processing of periodic structures. The formation of periodic ripples is explained by two mechanisms: direct interference of surface plasmons and incident laser, and grating-assisted coupling of surface plasmons with laser.

Citation Download Citation

Xu Wu and Jingya Sun "Ultrafast dynamics of femtosecond laser irradiation of silicon with different fluence", Proc. SPIE 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023), 127572J (17 August 2023); https://doi.org/10.1117/12.2690764

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