Subsurface damage assessment of femtosecond laser-processed surfaces

Jing Xu; Gong Chen; Jie Qiao; John C. Lambropoulos

doi:10.1117/12.2691712

29 November 2023 Subsurface damage assessment of femtosecond laser-processed surfaces

Jing Xu, Gong Chen, Jie Qiao, John C. Lambropoulos

Proceedings Volume 12778, Optifab 2023; 1277812 (2023) https://doi.org/10.1117/12.2691712
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

We present a new experimental method for assessing subsurface damage (SSD) on optical glasses processed using fs-laser. The method employed nanoindentation and Raman spectroscopy to characterize material damage. Statistically, our method shows over 95% confidence for SSD depths of over 55 nm. According to our results, the fs-laser processed surfaces with optimized processing parameters revealed no detectable SSD, thus establishing the feasibility of fs-laser polishing for precision optical manufacturing.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jing Xu, Gong Chen, Jie Qiao, and John C. Lambropoulos "Subsurface damage assessment of femtosecond laser-processed surfaces", Proc. SPIE 12778, Optifab 2023, 1277812 (29 November 2023); https://doi.org/10.1117/12.2691712

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