Spectrally narrowed lasing of a self-injection KrF excimer laser

Yasuhiro Shimada; Koichi Wani; Tadaaki Miki; Hidehito Kawahara; Mutsumi Mimasu; Yoshiro Ogata

doi:10.1117/12.20603

1 August 1990 Spectrally narrowed lasing of a self-injection KrF excimer laser

Yasuhiro Shimada, Koichi Wani, Tadaaki Miki, Hidehito Kawahara, Mutsumi Mimasu, Yoshiro Ogata

Proceedings Volume 1278, Excimer Lasers and Applications II; (1990) https://doi.org/10.1117/12.20603
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Spectrally nantwed lasing of a KrF excimer laser has teen ahieved by a self-injection technique using abeam splitter for power extraction aixi intravity etalons for spectral-narrowing. The laser cavity is divithi into an amplifying branch aix! a spectralnarrowing branch. The spectral bandwidth was narrowed to <3pm FWHM with air-sed etalons placed in the spectral-narrowing branch. A laser propagation model was intrOdUced for describing the laser intensity traveling in the laser cavity. The calculated intensityincident onthe intracavityetalons wassmaller thanthat in theconventional Fabry-Perotcavity withplane-parallel mirrors.

Citation Download Citation

Yasuhiro Shimada, Koichi Wani, Tadaaki Miki, Hidehito Kawahara, Mutsumi Mimasu, and Yoshiro Ogata "Spectrally narrowed lasing of a self-injection KrF excimer laser", Proc. SPIE 1278, Excimer Lasers and Applications II, (1 August 1990); https://doi.org/10.1117/12.20603

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