SF6 plasma-assisted Au nanostructure formation for LSPR sensing

Chih-Ching Ho; Chia-Ming Yang

doi:10.1117/12.2690425

30 November 2023 SF₆ plasma-assisted Au nanostructure formation for LSPR sensing

Chih-Ching Ho, Chia-Ming Yang

Proceedings Volume 12796, Functional Material Applications: From Energy to Sensing; 1279607 (2023) https://doi.org/10.1117/12.2690425
Event: SPIE Photonex, 2023, Glasgow, United Kingdom

Abstract

LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF₆ plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chih-Ching Ho and Chia-Ming Yang "SF₆ plasma-assisted Au nanostructure formation for LSPR sensing", Proc. SPIE 12796, Functional Material Applications: From Energy to Sensing, 1279607 (30 November 2023); https://doi.org/10.1117/12.2690425

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