Techniques for improved use of laboratory microscopes

T. Charles Podvin

doi:10.1117/12.3011891

12 October 2023 Techniques for improved use of laboratory microscopes

T. Charles Podvin

Proceedings Volume 12809, Bay Area Chrome Users Society Symposium 1985; 1280907 (2023) https://doi.org/10.1117/12.3011891
Event: 5th Annual BACUS Symposium, 1985, Sunnyvale, CA, United States

Abstract

Consider the process engineer who has more microscopes than people, the people don't like the scopes, and they are missing too many repeated defects in masks and defects in reticles. These instruments can be made more effective by simple techniques which reduce eyestrain, minimize distracting optical anomalies, and actually make defects easier to see.

Citation Download Citation

T. Charles Podvin "Techniques for improved use of laboratory microscopes", Proc. SPIE 12809, Bay Area Chrome Users Society Symposium 1985, 1280907 (12 October 2023); https://doi.org/10.1117/12.3011891

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