The path to low temperature crack-free high refractive index inorganic thin films

Omid Sadeghi; Cory K. Perkins; Douglas A. Keszler

doi:10.1117/12.3000392

15 March 2024 The path to low temperature crack-free high refractive index inorganic thin films

Omid Sadeghi, Cory K. Perkins, Douglas A. Keszler

Author Affiliations +

Proceedings Volume 12887, Oxide-based Materials and Devices XV; 128870K (2024) https://doi.org/10.1117/12.3000392
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

In optics, inorganic coatings such as TiO₂, ZrO₂, HfO₂, La₂O₃, and Ta₂O₅ surpass their organic or hybrid counterparts in terms of performance. They have the highest refractive index and remain unaffected by environmental degradation issues like yellowing. However, existing methods for creating inorganic coatings are limited to two approaches. The first involves costly and time-consuming techniques like physical vapor deposition (PVD) or chemical vapor deposition (CVD). The second approach, sol-gel synthesis, necessitates high temperatures that are incompatible with many substrates, resulting in rough surfaces and cracked samples. Phosio has introduced a platform technology for producing inorganic coatings with tunable refractive indices (ranging from n=1.30 to n=2.35). These coatings possess atomic smoothness and require minimal processing temperatures as low as 150°C. Furthermore, these materials can be cured with UV light and are compatible with nanoimprint lithography, all while maintaining environmental stability. In this manuscript, we share our journey to the process of achieving increased film thickness while ensuring the absence of cracks.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Omid Sadeghi, Cory K. Perkins, and Douglas A. Keszler "The path to low temperature crack-free high refractive index inorganic thin films", Proc. SPIE 12887, Oxide-based Materials and Devices XV, 128870K (15 March 2024); https://doi.org/10.1117/12.3000392

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