3-DOF angle measurement method based on two interference images

Xingyang Feng; Xionglei Lin; Liang Yu

doi:10.1117/12.3021974

25 January 2024 3-DOF angle measurement method based on two interference images

Xingyang Feng, Xionglei Lin, Liang Yu

Proceedings Volume 12972, International Academic Conference on Optics and Photonics (IACOP 2023); 1297204 (2024) https://doi.org/10.1117/12.3021974
Event: International Academic Conference on Optics and Photonics (IACOP 2023), 2023, ONLINE, China

Abstract

With the development of observation satellite, precision lathe and lithography, the demand for high-precision three-degree of freedom (3-DOF) angle measurement instruments is becoming increasingly urgent. Laser measurement has the advantages of high accuracy, non-contact, and large measurement range and is widely used in this area. We established a 3-DOF angle measurement method using two lasers and set a new algorithm to decouple its mathematical model. We analyzed the factors that may affect the resolution of this method, and achieved the simultaneous measurement of pitch, yaw, and roll angles in theory. Our method has high resolution theoretically and does not have the problem of inconsistent coordinate references.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Xingyang Feng, Xionglei Lin, and Liang Yu "3-DOF angle measurement method based on two interference images", Proc. SPIE 12972, International Academic Conference on Optics and Photonics (IACOP 2023), 1297204 (25 January 2024); https://doi.org/10.1117/12.3021974

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