Thickness dependence of VO2 microstructure and phase transition properties deposited on ITO substrate

Lanxuan Zeng; Yuxuan Lei; Le Li; Yi Liu; Fan Ye; Xingmin Cai; Aihua Zhong; Dongping Zhang

doi:10.1117/12.3021290

22 December 2023 Thickness dependence of VO₂ microstructure and phase transition properties deposited on ITO substrate

Lanxuan Zeng, Yuxuan Lei, Le Li, Yi Liu, Fan Ye, Xingmin Cai, Aihua Zhong, Dongping Zhang

Proceedings Volume 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers; 129820M (2023) https://doi.org/10.1117/12.3021290
Event: SPIE/SIOM Pacific Rim Laser Damage, 2023, Shanghai, China

Abstract

Vanadium dioxide is one of the reversible phase transition materials, which can be induced by temperature, electric field, laser, stress, etc. This characteristic makes thin films have great potential applications in fields of various optoelectronic devices. For electro-optical switch applications, a high extinction ratio and low threshold voltage are required, which are closely related to the VO₂ film thickness. In this paper, VO₂ thin films with different thicknesses were deposited on ITO substrates by pulsed magnetron sputtering. Microstructure, optical and electrical properties, and phase transition performance of the samples are investigated. The research results have a high reference value for the design of high-performance VO₂-based electro-optic switches.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lanxuan Zeng, Yuxuan Lei, Le Li, Yi Liu, Fan Ye, Xingmin Cai, Aihua Zhong, and Dongping Zhang "Thickness dependence of VO₂ microstructure and phase transition properties deposited on ITO substrate", Proc. SPIE 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers, 129820M (22 December 2023); https://doi.org/10.1117/12.3021290

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