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18 June 2024 Implementations of ESFS for fast topographic acquisition
Narcís Vilar, Roger Artigas, Martí Duocastella, Guillem Carles
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Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129970O (2024) https://doi.org/10.1117/12.3017816
Event: SPIE Photonics Europe, 2024, Strasbourg, France
Abstract
Optical metrology techniques allow for contactless surface measurement of three-dimensional objects at micro and nanoscale resolutions. Nevertheless, they often require acquiring multiple images from several focal planes, which is a slow process that severely limits topographic imaging speed. Here we introduce Encoded Search Focal Scan (ESFS), a technique capable of generating height maps of the sample from a significantly reduced number of images, down to single digits. Such a reduction enables commensurate speed improvements, allowing quasi-real-time topographic reconstructions. We implement ESFS using different system prototypes, including an imaging confocal microscope – used for reference –, a system based on an interferometric microscope objective, and a combination of an imaging confocal system with polarized detection. For each case, we analyze performance in terms of lateral resolution and acquisition speed. As our results demonstrate, ESFS opens the door to accurate topographic reconstructions of dynamic and rapidly moving systems.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Narcís Vilar, Roger Artigas, Martí Duocastella, and Guillem Carles "Implementations of ESFS for fast topographic acquisition", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970O (18 June 2024); https://doi.org/10.1117/12.3017816
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KEYWORDS
Interferometry
Microscopes
Modulation
Cameras
Phase unwrapping
Polarization
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