Lensless single-shot dual-wavelength digital holography for integrated circuit metrology

Huangcheng Shangguan; Paul Urbach; Jeroen Kalkman

doi:10.1117/12.3016436

7 April 2024 Lensless single-shot dual-wavelength digital holography for integrated circuit metrology

Huangcheng Shangguan, Paul Urbach, Jeroen Kalkman

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 1299714 (2024) https://doi.org/10.1117/12.3016436
Event: SPIE Photonics Europe, 2024, Strasbourg, France

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Huangcheng Shangguan, Paul Urbach, and Jeroen Kalkman "Lensless single-shot dual-wavelength digital holography for integrated circuit metrology", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 1299714 (7 April 2024); https://doi.org/10.1117/12.3016436

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