Parametric frequency comb generator based AlScN MEMS IR detector for low-power and high-performance applications

Hussein M. E. Hussein; Farah Ben Ayed; Aurelio Venditti; Pietro Simeoni; Zhenyun Qian; Cristian Cassella; Matteo Rinaldi

doi:10.1117/12.3014181

7 June 2024 Parametric frequency comb generator based AlScN MEMS IR detector for low-power and high-performance applications

Hussein M. E. Hussein, Farah Ben Ayed, Aurelio Venditti, Pietro Simeoni, Zhenyun Qian, Cristian Cassella, Matteo Rinaldi

Author Affiliations +

Proceedings Volume 13030, Image Sensing Technologies: Materials, Devices, Systems, and Applications XI; 130300A (2024) https://doi.org/10.1117/12.3014181
Event: SPIE Defense + Commercial Sensing, 2024, National Harbor, Maryland, United States

Abstract

This article addresses the imperative of reducing the limit-of-detection (LoD) in sensing systems, focusing on micro- and nanoelectromechanical (MEM/NEM) resonant technologies. Typically, advancements on MEM/NEM offer high sensitivity and electromechanical performance, which is crucial for achieving quantum-limited LoD. However, when these devices are integrated in closed-loop oscillator, frequency fluctuations are introduced due to electrical noise, degrading the LoD. This work proposes a novel sensing system for Aluminum Scandium Nitride (AlScN) microacoustic resonant infrared (IR) detectors that addresses these challenges. Moreover, it enables self-sustained oscillation states without active components, while consuming minimal power (∼10 mW) and limiting RF power dissipation (≤ 1 µW), thus shaping a new paradigm in sensing technology.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Hussein M. E. Hussein, Farah Ben Ayed, Aurelio Venditti, Pietro Simeoni, Zhenyun Qian, Cristian Cassella, and Matteo Rinaldi "Parametric frequency comb generator based AlScN MEMS IR detector for low-power and high-performance applications", Proc. SPIE 13030, Image Sensing Technologies: Materials, Devices, Systems, and Applications XI, 130300A (7 June 2024); https://doi.org/10.1117/12.3014181

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