Study on the effect of low nitrogen doping on the thermal stability of a-CN: H films of austenitic stainless steel

Jun Bi; Liejun Li

doi:10.1117/12.3016242

1 February 2024 Study on the effect of low nitrogen doping on the thermal stability of a-CN: H films of austenitic stainless steel

Jun Bi, Liejun Li

Author Affiliations +

Proceedings Volume 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023); 1306803 (2024) https://doi.org/10.1117/12.3016242
Event: Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 2023, Hefei, China

Abstract

In this paper, the influence mechanism of the existing forms of N and H in low-nitrogen-doped a-CN: H films on the microstructure and thermal stability of the films were preliminarily investigated. It provides theoretical support for further understanding the structure of diamond-like carbon films and improving the thermal stability of the films.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Jun Bi and Liejun Li "Study on the effect of low nitrogen doping on the thermal stability of a-CN: H films of austenitic stainless steel ", Proc. SPIE 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 1306803 (1 February 2024); https://doi.org/10.1117/12.3016242

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