Paper
1 February 2024 Performance of ultraviolet photodetectors based on sputtered CdZnTe films
Hongwei Li, Haofei Huang, Azhati Lina, Ke Xu, Keke Ding, Lei Zhang, Ke Tang, Linjun Wang, Jian Huang
Author Affiliations +
Proceedings Volume 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023); 1306817 (2024) https://doi.org/10.1117/12.3016336
Event: Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 2023, Hefei, China
Abstract
High-quality CdZnTe (CZT) films were fabricated using the radio frequency magnetron sputtering technique. Ultraviolet (UV) photodetectors based on CZT films were fabricated with gallium-doped zinc oxide (GZO) and gold electrodes. The electrodes and film thickness on the performance of CZT film UV photodetectors was studied. The results indicate that GZO electrodes can form good ohmic contact with CZT, thereby enhancing the sensitivity and response of CZT photodetectors. An increase in film thickness improves the film quality, resulting in enhanced performance of CZT film UV photodetectors.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Hongwei Li, Haofei Huang, Azhati Lina, Ke Xu, Keke Ding, Lei Zhang, Ke Tang, Linjun Wang, and Jian Huang "Performance of ultraviolet photodetectors based on sputtered CdZnTe films", Proc. SPIE 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 1306817 (1 February 2024); https://doi.org/10.1117/12.3016336
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KEYWORDS
Photodetectors

Ultraviolet radiation

Electrodes

Film thickness

Gold

Sputter deposition

Magnetrons

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