Research on the characteristics of MEMS thermal conductive gas sensors in different driving modes

Haiqing Zhang

doi:10.1117/12.3029383

6 May 2024 Research on the characteristics of MEMS thermal conductive gas sensors in different driving modes

Haiqing Zhang

Proceedings Volume 13107, Fourth International Conference on Sensors and Information Technology (ICSI 2024); 131070O (2024) https://doi.org/10.1117/12.3029383
Event: Fourth International Conference on Sensors and Information Technology (ICSI 2024), 2024, Xiamen, China

Abstract

This paper is developing thermal conductivity gas sensors based on MEMS technology, proposing different driving modes and analyzing their characteristics. Firstly to analyze the principle of thermal conductivity gas sensors. Secondly, introduce the software and hardware designs in the driving modes of constant voltage, constant current, and constant temperature. Perform the experimental research on the relationship of sensor concentration with signal, response time, and characteristics affected by temperature in three driving modes. The experimental result shows that gas concentration measurement can be achieved in three different driving modes. But the linearity, response time, and temperature characteristics of the sensor are different. Driving modes can be selected according to actual application requirement. This paper provided technical support for developing MEMS thermal conductivity gas sensors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Haiqing Zhang "Research on the characteristics of MEMS thermal conductive gas sensors in different driving modes", Proc. SPIE 13107, Fourth International Conference on Sensors and Information Technology (ICSI 2024), 131070O (6 May 2024); https://doi.org/10.1117/12.3029383

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