AlSiC spherical optical element surface shape detection

Hang Gao; Chunyan Wu; Changhe Song; Changyu Wei; Ziqi Xu

doi:10.1117/12.3034327

5 July 2024 AlSiC spherical optical element surface shape detection

Hang Gao, Chunyan Wu, Changhe Song, Changyu Wei, Ziqi Xu

Proceedings Volume 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024); 1318315 (2024) https://doi.org/10.1117/12.3034327
Event: The 3rd International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 2024, Wuhan, China

Abstract

The AlSiC spherical optical element is one of the basic optical elements preferred in modern optical systems. Spherical optical systems not only occupy a leading position in traditional civilian products such as digital cameras and medical devices, but also play an irreplaceable important role in high-tech frontier fields such as lithographic objectives and high-power laser drivers. A theoretical model is established and the mathematical relationship between the standard mirror square focus, the reference plane and the measured sphere is analyzed by using the two-sided sphere method. The experiment verifies the feasibility of using 4mm RMS reference plane to detect 1mmAlSiC RMS surface. The absolute root mean square of the measured surface is about 1mm, and the variation range is ±0.15nm. The absolute root-mean-square measurement of the reference plane is about 4.2mm, and the variation range is ±0.2mm.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Hang Gao, Chunyan Wu, Changhe Song, Changyu Wei, and Ziqi Xu "AlSiC spherical optical element surface shape detection", Proc. SPIE 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 1318315 (5 July 2024); https://doi.org/10.1117/12.3034327

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