Dual-wavelength heterodyne interferometry for rough-surface measurements

Edgar W. Fischer; Zoran Sodnik; Thomas Ittner; Hans J. Tiziani

doi:10.1117/12.34857

1 July 1990 Dual-wavelength heterodyne interferometry for rough-surface measurements

Edgar W. Fischer, Zoran Sodnik, Thomas Ittner, Hans J. Tiziani

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Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34857
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

For interferometric topography measurements of optically rough surfaces dual wavelength heterodyne interferometry (DWHI) is a powerful tool. A DWHI system based on a two-wavelength HeNe laser and a matched grating technique is described. This set-Sup improves system stability and allows a simple heterodyne frequency generation. 1.

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Edgar W. Fischer, Zoran Sodnik, Thomas Ittner, and Hans J. Tiziani "Dual-wavelength heterodyne interferometry for rough-surface measurements", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34857

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